To promote micro- and nano-engineering in Europe, the MNE Steering Committee recognizes a researcher or engineer every year who has made outstanding contributions to fields addressed by the MNE conference.

The aim is to honor a researcher or engineer who has inspired the MNE community by his/her leadership or outstanding work. This could, for example, be through leadership in the successful development and commercialization of a technology, the pioneering of a method or development of a tool with significant impact on current research or manufacturing methods, or an outstanding invention.

The award ceremony will take place during a Plenary Session of the MNE Conference. In previous years the MNE Fellow Award was bestowed to:

• Dr. Haroon Ahmed from University of Cambridge (founder of Microengineering conference, which became the Micro & Nanoengineering conference) at MNE 2003, Cambridge
• Dr. Peter Vettiger from IBM Research – Zurich at MNE 2005, Vienna
• Dr. Mike Hatzakis from NCSR Demokritos Athens at MNE 2006, Barcelona
• Dr. Bruno Murari from ST Microelectronics at MNE 2010, Genoa
• Dr. Luc Van den Hove from IMEC at MNE 2011, Berlin
• Dr. Hans Löschner from IMS Nanofabrication AG in Austria at MNE 2012, Toulouse
• Prof. Dr. Dieter Kern from the University of Tübingen at MNE 2014, Lausanne
• Dr. Emile van der Drift from Technical University of Delft at MNE 2015, The Hague
• Prof. Dr. Nico de Rooij, professor emeritus at the EPFL Lausanne and Vice-President at CSEM SA
• Prof. Andreas Manz from Saarland University of Saarbrücken at MNE 2017, Braga
• Dr. John Randall from Zyvex Labs, USA at MNE 2018, Copenhagen

The MNE conference gives much relevance to the poster session. Contributions selected for poster presentation do not have less scientific quality than contributions selected for oral presentation, but their contents are expected to be more suitable for communication in poster form. To highlight the importance of the poster session, awards are given to the best posters.

The posters will be evaluated per topic and four Best Poster Awards will be given out, one for each topic:

• Advanced Nanopatterning,
• Nanofabrication for functionality,
• Nanodevices – MEMS and their applications, and
• Lab-on-a-chip /Nanofabrication for life science applications.

The evaluation will be based on the assessment of the abstract reviewers and by the poster examination from the jury during the conference.

Winner announcement: The Best Poster Award Winners will be announced during the conference dinner on September 26^th.

Advance Nanopatterning:

SEM Inspection of Nanowire Devices: Contact Inspection, Resistance and Cpacitance Measurement and Buckling Evaluation

Takeyoshi Ohashi¹, Kazuhisa Hasumi², Masami Ikota², Gian Lorusso³, Hans Mertens³, Liesbeth Witters³, Naoto Horiguchi³

¹Hitachi, Ltd.,

²Hitachi High-Technologies Corporation,

³imec

Nanofabrication for Functionality:

Hydrophobic Desalination Membranes from common Hydrophilic Materials

Zain Ahmad, Ratul Das, Sankara Arunachalam, Ulrich Buttner, Himanshu Mishra

King Abdullah University of Science and Technology, Saudi Arabia

Nanodevies - MEMS and their applications:

3D tactile microprobe with isotropic kinematics for industrial micro metrology

David Metz¹, Stephan Jantzen², Karin Kniel², Martin Stein², Andreas Dietzel¹

¹Technische University Braunschweig, Institute of Microtechnology,

²Physikalisch-Technische Bundesanstalt (PTB), Department of Coordinate Metrology

Lab-on-a-chip / Nanofabrication for Life Science Applications:

Internalization and viability studies of suspended nanowires silicon chips in HeLa cells

Sara Duran¹, Marta Duch¹, Rodrigo Gomez¹, Marta Fernandez¹, Manuel Reina², Claudia Müller², Alvaro San Paulo³, Jaume Esteve¹, Susana Castel², Jos. Antonio Plaza¹

¹Institute of Microelectronics of Barcelona IMB-CNM, (CSIC),

²Departament de Biologia Cellular, Universitat de Barcelona, 3Instituto de Microelectronica de Madrid, IMMCNM (CSIC)