45th International Conference on Micro & Nano Engineering

MNE 2019 Organising Committee

Evangelos Gogolides
Conference Chair,

Angeliki Tserepi
Program Chair,

Conference Co-Chairs per topic:

1.Lithography / Etching ,
Panagiotis Argitis, Vassilios Constantoudis, Nikos Kehagias, George Kokkoris

2. Nanofabrication ,
Eleni Makarona, Nikos Papanikolaou, Vasilis Vamvakas, Kosmas Ellinas

3. Nanodevices / MEMS ,
Panagiotis Dimitrakis, Nikos Glezos, Pascal Normand, Christos Tsamis, Dimitris Tsoukalas

4. Life Sciences Devices ,
Panagiota Petrou, Kostas Misiakos, Katerina Tsougeni

5. Exhibition Chairs ,
Ioannis Raptis, Kosmas Ellinas

6. Educational Εvents ,
Konstantinos Giannakopoulos

7. Workshops ,
Nikos Vourdas

MNE International Steering Committee

Jean-Francois de Marneffe, IMEC BE
Michel Despont, CSEM CH
Zahid Durrani, Imperial College UK
Massimo De Vittorio, University of Salento / IIT IT
Evangelos Gogolides, NCSR Demokritos GR
Gabi Grützner, Microresist Technology GmbH DE
Yoshihiko Hirai, Osaka Prefecture University JP
Alexander Liddle, NIST USA
Michael Muehlberger, Profactor GmbH AU
Francesc Pérez-Murano, CNM-IMB Barcelona ES
Urs Staufer (Chair), Delft University of Technology NL
Stephan Sylvest Keller, Technical University of Denmark DK
Christophe Vieu, LAAS-CNRS Toulouse FR

MNE 2019 International Advisory Committee

Yifang Chen (Fudan Un)

Maria Kitsara (UPMC)

Andreas Erdmann (FhG)

Michael Kiziroglou (ATEIT)

Stergios Logothetidis (AUTH)

Kostas Panagiotou (AUTH)

Panos Patsalas (AUTH)

Fillippos Farmakis (DUTH)

Theodore Sarris (DUTH)

Maria Farsari (FORTH)

Electra Gizeli (FORTH)

Athanasios Speliotis (NCSRD)

Androula Nassiopoulou (NCSRD)

Vassilis Kilikoglou (NCSRD)

Sotirios Kakabakos (NCSRD)

Maria Kandyla (NHRF)

Evangelia Sarantopoulou (NHRF)

Nikos Tagmatarchis (NHRF)

Andreas Boudouvis (NTUA)

Athanasios Papathanasiou (NTUA)

Ioanna Zergioti (NTUA)

Ioannis Zuburtikudis (TEIK & ADU )

Margarita Chatzichristidi (UOA)

Anastasios Economou (UOA)

George Konstantinidis (UOC)

Nikolaos Chaniotakis (UOC)

Emmanuel Stratakis (UOC)

Konstantinos Beltsios (UOI)

Eleftherios Lidorikis (UOI)

Dimitris Alexandropoulos (UPatras)

Theodore Christopoulos (UPatras)

Dimitrios Mataras (UPatras)

Dimitris Skarlatos (UPatras)

Grigoris Kaltsas (WATU)

George Patsis (WATU)

JaeJong Lee (KIMM)

Themis Prodromakis (SOTON)

Jin-Woo Choi (LSU)

Ahmed Bousnaina (NEU)

Nikos Chronis (UMICH)

Antonis Olziersky (IBM)

Dimitrios Kazazis (PSI)

MNE 2019 International Programme Committee

Dimitrios Alexandropoulos, University of Patras - Greece
Maan Alkaisi, University of Canterbury – New Zealand
Panagiotis Argitis, NCSR Demokritos – Greece
Naoufal Bahlawane, Luxembourg Institute of Science and Technology (LIST) – Luxembourg
Joan Bausells, IMB-CNM (CSIC) – Spain
Konstantinos Beltsios, University of Ioannina,- Greece
Gérard Benassayag, CEMES/CNRS – France
Andre Bernard, NTB Buchs- Switzerland
Andreas Boudouvis, National Technical University of Athens – Greece
Martin Brandl, Danube University Krems – Austria
Hubert Brueckl, Danube University Krems – Austria
Andrea Cattoni, Centre de Nanosciences et de Nanotechnologies (C2N), CNRS – France
Wen-Huei Chang, Department of Applied Chemistry, National Pingtung University – Taiwan
Margarita Chatzichristidi, National and Kapodistrian University of Athens – Greece
Hsuen-Li Chen, Department of Materials Science and Engineering National Taiwan University Taipei – Taiwan
Yong Chen, Ecole Normale Supérieure/CNRS – France
Lei Chen, National Institute of Standards and Technology (NIST) – United States
Rebecca Cheung, University of Edinburgh – United Kingdom
Theodoros Christopoulos, University of Patras - Greece
Jin-Woo Choi, Louisiana State University – United States
Nikos Chronis, UMIC – USA
Vassilios Constantoudis, Institute of Nanoscience and Nanotechnology, NCSR Demokritos – Greece
Massimo De Vittorio, IIT – Italy
Emiliano Descrovi, Politecnico di Torino – Italy
Panagiotis Dimitrakis, Institute of Nanoscience and Nanotechnology , NCSR ‘Demokritos’ – Greece
Zoran Djuric, Serbian Academy of Sciences and Arts – Institute of Technical Sciences – Serbia
Demetre Economou, University of Houston – USA
Anastasios Economou, UOA- Greece
Kosmas Ellinas, NCSR Demokritos –Greece
Andreas Erdmann, Fraunhofer Institute for Integrated Systems and Device Technology IISB – Germany
Pedro Estrela, University of Bath - United Kingdom
Filippos Farmakis, Electrical and Computer Engineering Dept., Democritus University of Thrace – Greece
Maria Farsari, FORTH -Greece
Monika Fleischer, University of Tuebingen – Germany
Susana Freitas, INESC-MN and Instituto Superior Técnico – Portugal
Hiroshi Fukuda, Hitachi High-Technologies Corporation – Japan
Stefan Gendt, Imec / KULeuven – Belgium
Annamari Gerardino, CNR-Institute for Photonics and Nanotechnologies – Italy
Gerald Gerlach, Technische Universität Dresden – Germany
Konstantinos Giannakopoulos, Institute of Nanoscience and Nanotechnologyh, NCSR Demokritos – Greece
Evangelos Gogolides, Institute of Nanoscience and Nanotechnologyh, NCSR Demokritos – Greece
Markus Graf, Sensirion AG – Switzerland
Cornelis Wouter Hagen, Delft University of Technology – Netherlands
Line Hagner Nielsen, Technical University of Denmark – Denmark
Anpan Han, DTU Danchip / CEN Technical Unversity of Denmark, DTU – Denmark
Harry Heinzelmann, CSEM – Switzerland
Yoshihiko Hirai, Osaka Prefecture University - Japan
Jörg Hübner, DTU Danchip / CEN Technical Unversity of Denmark, DTU – Denmark
Toshiro Itani, EIDEC, Inc. – Japan
Grigoris Kaltsas, Technological Educational Institute (T.E.I) of Athens – Greece
Maria Kandyla, NHRF – Greece
Jeroen Kan, Physics department National University Singapore – Singapore
Songphol Kanjanachuchai, Chulalongkorn University – Thailand
Nikolaos Kehagias, Catalan Institute of Nanoscience and Nanotechnology – Spain
Stephan Keller, DTU Nanotech – Denmark
Beomjoon Kim, The University of Tokyo – Japan
Robert Kirchner, Technische Universität Dresden – Germany
Maria Kitsara , University Pierre and Marie CURIE –France
Michael Kiziroglou, ATEIT – Greece
Armin Knoll , IBM Research – Zurich - Switzerland
Fu-Hsiang Ko, INSTITUTE OF NANOTECHNOLOGY, NATIONAL CHIAO TUNG UNIVERSITY – Taiwan
Manfred Kohl, Karlsruhe Institute of Technology – Germany

George Kokkoris, NCSR Demokritos – Greece
Michael Kraft , University of Leuven – Belgium
Jaejong Lee, Korea Institute of Machinery and Materials – Korea
Thierry Leichle, LAAS-CNRS – France
James Liddle, Center for Nanoscale Science and Technology, NIST – United States
Eleftherios Lidorikis, University of Ioannina – Greece
Chun-Hung Lin, National Cheng Kung University – Taiwan
Andreu Llobera, Carl Zeiss Vision – Spain
Hans Loeschner, IMS Nanofabrication AG – Austria
Regina Luttge, Eindhoven University of Technology – Netherlands
Eleni Makarona, Institute of Nanoscience nad Nanotechnology, NCSR Demokritos – Greece
John Maltabes, Rochester Institute of Technology – USA
Jean-Francois Marneffe, imec vzw – Belgium
Adrian Martinez-Rivas, CIC-Instituto Politécnico Nacional (IPN)-Mexico – Mexico
Konstantinos Megaridis, University of Illinois at Chicago - USA
Santos Merino, IK4-TEKNIKER – Spain
Athanasios Millionis, ETH Zurich – Switzerland
Faisal Mohd-Yasin, Queensland Micro- and Nanotechnology Center, Griffith University – Australia
Despina Moschou, University of Bath - United Kingdom
Xavier Munoz-Berbel, IMB-CNM-CSIC – Spain
Androula Nassiopoulou , NCSR Demokritos -Greece
Pascal Normand, NCSR Demokritos – Greece
Je Oh, Hanyang University – Korea
Antonis Olziersky , IBM – Switzerland
Heidi Ottevaere, Vrije Universiteit Brussel – Belgium
Leonidas Palilis, University of Patras – Greece
Nikos Papanikolaou , NCSR Demokritos - Greece
Athanasios Papathanasiou , NTUA – Greece
Antonio Pasquale, SNS - Italy
Tung-Ming Pan, Chang Gung University – Taiwan
Inkyu Park, KAIST – Korea
Francesc Perez-Murano, IMB-CNM (CSIC) – Spain
Panagiota Petrou, NCSR Demokritos - Greece
David Peyrade, LTM – CNRS UGA c/o CEA – LETI – MINATEC – France
Ferruccio Pisanello, Istituto Italiano di Tecnologia – Italy
Philip Prewett, Oxford Scientific Consultants Ltd – Netherlands
Christelle Prinz, Lund University – Sweden
Iris Prinz, Stratec Consumables GmbH – Austria
Jose-Manuel Quero, University of Seville –Spain
Muhammad Rafiq, Pakistan Institute of Engineering and Applied Sciences Islamabad Pakistan – Pakistan
John Randall, Zyvex Labs – United States
Ioannis Raptis, NCSR Demokritos – Greece
Moh’d Rezeq, Khalifa University of Science and Technology – Abu Dhabi
Gemma Rius, IMB-CNM (CSIC) – Spain
Alex Robinson, University of Birmingham – United Kingdom
Kurt Ronse, Imec – Belgium
Francois Rossi, European Commission – Italy
Evangelia Sarantopoulou, NHRF –Greece
Steven Schofield, University College London – United Kingdom
Jian Shi, Ecole Normale Supérieure de Paris – France
Alejandro Silhanek, Université de Liège – Belgium
Urs Staufer, Delft University of Technology – Netherlands
Andris Sternberg, Institute of Solid State Physics, University of Latvia – Latvia
Rafael Taboryski, DTU Nanotech – Denmark
Nikos Tagmatarchis, NHRF –Greece
Christos Tsamis, NCSR Demokritos- Insti. of Nanoscience and Nanotechnology – Greece
Angeliki Tserepi, NCSR Demokritos – Greece
Katerina Tsougeni, NCSR Demokritos – Greece
Dimitris Tsoukalas, National Technical University of Athens – Greece
Yoshi Tsuchiya, University of Southampton – United Kingdom
Vasilis Vamvakas, NCSR Demokritos – Greece
Christophe Vieu, Université de Toulouse, LAAS-CNRS – France
Nikos Vourdas, NCSR Demokritos – Greece
Katia Vutova, Professor, Dr.Sc., PhD, Institute of electronics, Bulgarian Academy of Sciences – Bulgaria
Remco Wiegerink, MESA+ Institute for Nanotechnology, University of Twente – Netherlands
Sandra Wolff, TU Kaiserslautern, Nano Structuring Center – Germany
Ioanna Zergioti, NTUA – Greece
Cui Zheng, China
Cezar Zota , IBM Research – Switzerland
Ioannis Zoubourtikoudis , TEIK - Greece